Glancing angle deposition of sculptured thin metal films at room temperature

dc.bibliographicCitation.firstPage385604
dc.bibliographicCitation.issue38
dc.bibliographicCitation.journalTitleNanotechnologyeng
dc.bibliographicCitation.volume28
dc.contributor.authorLiedtke, S.
dc.contributor.authorGrüner, C.
dc.contributor.authorLotnyk, A.
dc.contributor.authorRauschenbach, B.
dc.date.accessioned2023-01-20T08:11:28Z
dc.date.available2023-01-20T08:11:28Z
dc.date.issued2017-9-1
dc.description.abstractMetallic thin films consisting of separated nanostructures are fabricated by evaporative glancing angle deposition at room temperature. The columnar microstructure of the Ti and Cr columns is investigated by high resolution transmission electron microscopy and selective area electron diffraction. The morphology of the sculptured metallic films is studied by scanning electron microscopy. It is found that tilted Ti and Cr columns grow with a single crystalline morphology, while upright Cr columns are polycrystalline. Further, the influence of continuous substrate rotation on the shaping of Al, Ti, Cr and Mo nanostructures is studied with view to surface diffusion and the shadowing effect. It is observed that sculptured metallic thin films deposited without substrate rotation grow faster compared to those grown with continuous substrate rotation. A theoretical model is provided to describe this effect.eng
dc.description.versionpublishedVersioneng
dc.identifier.urihttps://oa.tib.eu/renate/handle/123456789/10952
dc.identifier.urihttp://dx.doi.org/10.34657/9978
dc.language.isoeng
dc.publisherBristol : IOP Publ.
dc.relation.doihttps://doi.org/10.1088/1361-6528/aa7a79
dc.relation.essn1361-6528
dc.relation.issn0957-4484
dc.rights.licenseCC BY 3.0 Unported
dc.rights.urihttps://creativecommons.org/licenses/by/3.0/
dc.subject.ddc530
dc.subject.otherGlancing angle depositioneng
dc.subject.otheroblique depositioneng
dc.subject.otherporosityeng
dc.subject.otherscanning electron microscopyeng
dc.subject.othersculptured metallic thin filmseng
dc.subject.othertransmission electron microscopyeng
dc.titleGlancing angle deposition of sculptured thin metal films at room temperatureeng
dc.typeArticleeng
dc.typeTexteng
tib.accessRightsopenAccesseng
wgl.contributorIOM
wgl.subjectPhysikger
wgl.typeZeitschriftenartikelger
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