Microplasmas: A Review

dc.bibliographicCitation.firstPage45
dc.bibliographicCitation.issue1
dc.bibliographicCitation.journalTitleThe Open Applied Physics Journal
dc.bibliographicCitation.lastPage63
dc.bibliographicCitation.volume4
dc.contributor.authorPapadakis, A. P.
dc.date.accessioned2025-03-05T07:21:37Z
dc.date.available2025-03-05T07:21:37Z
dc.date.issued2011
dc.description.abstractIn this paper, a review on microplasma discharges is conducted. The different types and configurations used in microplasmas such as the Cathode Boundary Layer (CBL), Dielectric Barrier Discharge (DBD), Capillary Plasma Electrode Discharge (CPED), Inverted Square Pyramid (ISP), Square Cross Sectional Cavities (SCSC), Radio Frequency Inductively Coupled Discharge (RFIC), Radio Frequency Capacitive Coupled Discharge (RFCC), Micro-Hollow Cathode Discharge (MHCD), and microstrip technology (MS) discharges at different operating conditions are discussed. Numerical and experimental methods used for the analysis of the physics involved in these microplasmas, as well as the different construction methods used, are also described.eng
dc.description.versionpublishedVersioneng
dc.identifier.urihttps://oa.tib.eu/renate/handle/123456789/18779
dc.identifier.urihttps://doi.org/10.34657/17798
dc.language.isoeng
dc.publisherOak Park, Ill. : Bentham Science Publ.
dc.relation.doihttps://doi.org/10.2174/1874183501104010045
dc.relation.essn1874-1835
dc.rights.licenseCC BY-NC 3.0 Unported
dc.rights.urihttps://creativecommons.org/licenses/by-nc/3.0/
dc.subject.ddc530
dc.subject.otherCathode Boundary Layer (CBL)eng
dc.subject.otherDielectric Barrier Discharge (DBD)eng
dc.subject.otherCapillary Plasma Electrode Discharge (CPED)eng
dc.subject.otherInverted Square Pyramid (ISP)eng
dc.subject.otherSquare Cross Sectional Cavities (SCSC)eng
dc.subject.otherRadio Frequency Inductively Coupled Discharge (RFIC)eng
dc.subject.otherRadio Frequency Capacitive Coupled Discharge (RFCC)eng
dc.subject.otherMicro-Hollow Cathode Discharge (MHCD)eng
dc.subject.othermicrostrip technology (MS)eng
dc.titleMicroplasmas: A Revieweng
dc.typeArticle
dc.typeText
tib.accessRightsopenAccess
wgl.contributorINP
wgl.subjectPhysikger
wgl.typeZeitschriftenartikelger
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