CMOS-Compatible Silicon Photonic Sensor for Refractive Index Sensing Using Local Back-Side Release
dc.bibliographicCitation.firstPage | 1241 | eng |
dc.bibliographicCitation.issue | 19 | eng |
dc.bibliographicCitation.journalTitle | IEEE photonics technology letters : PTL | eng |
dc.bibliographicCitation.lastPage | 1244 | eng |
dc.bibliographicCitation.volume | 32 | eng |
dc.contributor.author | Steglich, Patrick | |
dc.contributor.author | Bondarenko, Siegfried | |
dc.contributor.author | Mai, Christian | |
dc.contributor.author | Paul, Martin | |
dc.contributor.author | Weller, Michael G. | |
dc.contributor.author | Mai, Andreas | |
dc.date.accessioned | 2021-11-15T10:23:15Z | |
dc.date.available | 2021-11-15T10:23:15Z | |
dc.date.issued | 2020 | |
dc.description.abstract | Silicon photonic sensors are promising candidates for lab-on-a-chip solutions with versatile applications and scalable production prospects using complementary metal-oxide semiconductor (CMOS) fabrication methods. However, the widespread use has been hindered because the sensing area adjoins optical and electrical components making packaging and sensor handling challenging. In this work, a local back-side release of the photonic sensor is employed, enabling a separation of the sensing area from the rest of the chip. This approach allows preserving the compatibility of photonic integrated circuits in the front-end of line and metal interconnects in the back-end of line. The sensor is based on a micro-ring resonator and is fabricated on wafer-level using a CMOS technology. We revealed a ring resonator sensitivity for homogeneous sensing of 106 nm/RIU. © 1989-2012 IEEE. | eng |
dc.description.version | publishedVersion | eng |
dc.identifier.uri | https://oa.tib.eu/renate/handle/123456789/7283 | |
dc.identifier.uri | https://doi.org/10.34657/6330 | |
dc.language.iso | eng | eng |
dc.publisher | New York, NY : IEEE | eng |
dc.relation.doi | https://doi.org/10.1109/LPT.2020.3019114 | |
dc.relation.essn | 1941-0174 | |
dc.rights.license | CC BY 4.0 Unported | eng |
dc.rights.uri | https://creativecommons.org/licenses/by/4.0/ | eng |
dc.subject.ddc | 620 | eng |
dc.subject.other | integrated photonics | eng |
dc.subject.other | photonic biosensor | eng |
dc.subject.other | refractive index sensing | eng |
dc.subject.other | Silicon photonic sensor | eng |
dc.subject.other | silicon photonics | eng |
dc.title | CMOS-Compatible Silicon Photonic Sensor for Refractive Index Sensing Using Local Back-Side Release | eng |
dc.type | Article | eng |
dc.type | Text | eng |
tib.accessRights | openAccess | eng |
wgl.contributor | IHP | eng |
wgl.subject | Ingenieurwissenschaften | eng |
wgl.type | Zeitschriftenartikel | eng |
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