In-depth analysis of elements and properties of hydrated subsurface layers on optical surfaces of a SiO2-BaO-B2O3 glass with SIMS, IBSCA, RBS and NRA Part 1. Experimental procedures and results

Abstract

The formation of thin subsurface layers was studied which occurred during the chemical interaction of polished and cleaned optical surfaces with different slurries before and after covering them with λ/4-MgF2 coatings. By a suitable selection of the parameters for these chemical interactions a thickness of the subsurface layers was produced which allowed to meet the requirements of the various surface analysis methods. The thicknesses and the refractive indices of the subsurface layers could be calculated from the measured spectral reflectances. Slurries with a pH value < 9 were applied so that a leaching of glass components from the subsurface layers occurred. This was indicated by the refractive indices and was studied in detail by analyzing the in-depth distributions of the glass components. Distinct matrix effects could be disclosed from the in-depth profiles for SIMS and IBSCA by a comparison with the results of the quantitative analysis with RBS and NRA. These matrix effects were different within the subsurface layers from those observed for the bulk glass. The quantitative analysis of the hydrogen in-depth distributions by NRA allows for the first time to link differences in the matrix effects with a different hydrogen content within the subsurface layers.