Verified modeling of a low pressure hydrogen plasma generated by electron cyclotron resonance

Abstract

A self-consistent fluid model has been successfully developed and employed to model an electron cyclotron resonance driven hydrogen plasma at low pressure. This model has enabled key insights to be made on the mutual interaction of microwave propagation, power density, plasma generation, and species transport at conditions where the critical plasma density is exceeded. The model has been verified by two experimental methods. Good agreement with the ion current density and floating potential—as measured by a retarding energy field analyzer—and excellent agreement with the atomic hydrogen density—as measured by two-photon absorption laser induced fluorescence—enables a high level of confidence in the validity of the simulation.