The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication
dc.bibliographicCitation.firstPage | 304 | eng |
dc.bibliographicCitation.journalTitle | Beilstein journal of nanotechnology | eng |
dc.bibliographicCitation.lastPage | 318 | eng |
dc.bibliographicCitation.volume | 12 | eng |
dc.contributor.author | Deinhart, Victor | |
dc.contributor.author | Kern, Lisa-Marie | |
dc.contributor.author | Kirchhof, Jan N. | |
dc.contributor.author | Juergensen, Sabrina | |
dc.contributor.author | Sturm, Joris | |
dc.contributor.author | Krauss, Enno | |
dc.contributor.author | Feichtner, Thorsten | |
dc.contributor.author | Kovalchuk, Sviatoslav | |
dc.contributor.author | Schneider, Michael | |
dc.contributor.author | Engel, Dieter | |
dc.contributor.author | Pfau, Bastian | |
dc.contributor.author | Hecht, Bert | |
dc.contributor.author | Bolotin, Kirill I. | |
dc.contributor.author | Reich, Stephanie | |
dc.contributor.author | Höflich, Katja | |
dc.date.accessioned | 2022-03-16T12:12:34Z | |
dc.date.available | 2022-03-16T12:12:34Z | |
dc.date.issued | 2021 | |
dc.description.abstract | Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such a high patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial. Here, we introduce the Python toolbox FIB-o-mat for automated pattern creation and optimization, providing full flexibility to accomplish demanding patterning tasks. FIB-o-mat offers high-level pattern creation, enabling high-fidelity large-area patterning and systematic variations in geometry and raster settings. It also offers low-level beam path creation, providing full control over the beam movement and including sophisticated optimization tools. Three applications showcasing the potential of He ion beam nanofabrication for two-dimensional material systems and devices using FIB-o-mat are presented. | eng |
dc.description.version | publishedVersion | eng |
dc.identifier.uri | https://oa.tib.eu/renate/handle/123456789/8248 | |
dc.identifier.uri | https://doi.org/10.34657/7286 | |
dc.language.iso | eng | eng |
dc.publisher | Frankfurt, M. : Beilstein-Institut zur Förderung der Chemischen Wissenschaften | eng |
dc.relation.doi | https://doi.org/10.3762/bjnano.12.25 | |
dc.relation.essn | 2190-4286 | |
dc.rights.license | CC BY 4.0 Unported | eng |
dc.rights.uri | https://creativecommons.org/licenses/by/4.0/ | eng |
dc.subject.ddc | 620 | eng |
dc.subject.ddc | 540 | eng |
dc.subject.other | automated patterning | eng |
dc.subject.other | focused He ion beam | eng |
dc.subject.other | graphene | eng |
dc.subject.other | magnetic multilayers | eng |
dc.subject.other | mechanical resonator | eng |
dc.subject.other | pattern generation | eng |
dc.subject.other | plasmonic antennas | eng |
dc.subject.other | two-dimensional materials | eng |
dc.title | The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication | eng |
dc.type | Article | eng |
dc.type | Text | eng |
tib.accessRights | openAccess | eng |
wgl.contributor | FBH | eng |
wgl.contributor | MBI | eng |
wgl.subject | Ingenieurwissenschaften | eng |
wgl.type | Zeitschriftenartikel | eng |
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