Highly Symmetric and Extremely Compact Multiple Winding Microtubes by a Dry Rolling Mechanism

Abstract

Rolled-up nanotechnology has received significant attention to self-assemble planar nanomembranes into 3D micro and nanotubular architectures. These tubular structures have been well recognized as novel building blocks in a variety of applications ranging from microelectronics and nanophotonics to microbatteries and microrobotics. However, fabrication of multiwinding microtubes with precise control over the winding interfaces, which is crucial for many complex applications, is not easy to achieve by existing materials and technologies. Here, a dry rolling approach is introduced to tackle this challenge and create tight windings in compact and highly symmetric cylindrical microstructures. This technique exploits hydrophobicity of fluorocarbon polymers and the thermal expansion mismatch of polymers and inorganic films upon thermal treatment. Quality parameters for rolled-up microtubes, against which different fabrication technologies can be benchmarked are defined. The technique offers to fabricate long freestanding multiwinding microtubes as well as hierarchical architectures incorporating rolled-up wrinkled nanomembranes. This work presents an important step forward toward the fabrication of more complex but well-controlled microtubes for advanced high-quality device architectures. © 2020 The Authors. Published by WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim