Hα emission in the presence of dust in an Ar-C2H 2 radio-frequency discharge

Abstract

We present the results of time resolved spectroscopy measurements of the Hα line of atomic hydrogen in an Ar-C2H2 radiofrequency plasma. The presence of the fast (high-energy) and slow (low-energy) components of the hydrogen atoms can be deduced from the Doppler broadening of the Hα line. With the appearance of the dust particles, the Hα profile became narrower, indicating reduction of the fast component. We discuss several mechanisms for the formation of the fast hydrogen atoms in our plasma. The main cause for the reduction of the hydrogen atom fast component is the plasma change from electropositive to electronegative, decreasing the sheath's width and voltage. The change of plasma conditions coincides with the end of the dust coagulation/agglomeration when the dust particles become multiply negatively charged. We propose here a new experimental technique for detection of the dust coagulation/agglomeration phase.