Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists
dc.bibliographicCitation.firstPage | 43 | eng |
dc.bibliographicCitation.issue | 1 | eng |
dc.bibliographicCitation.journalTitle | International journal of precision engineering and manufacturing-green technology : IJPEM-GT | eng |
dc.bibliographicCitation.lastPage | 57 | eng |
dc.bibliographicCitation.volume | 9 | eng |
dc.contributor.author | Roos, Michael M. | |
dc.contributor.author | Winkler, Andreas | |
dc.contributor.author | Nilsen, Madeleine | |
dc.contributor.author | Menzel, Siegfried B. | |
dc.contributor.author | Strehle, Steffen | |
dc.date.accessioned | 2022-03-04T08:00:01Z | |
dc.date.available | 2022-03-04T08:00:01Z | |
dc.date.issued | 2022 | |
dc.description.abstract | Current trends in miniaturized diagnostics indicate an increasing demand for large quantities of mobile devices for health monitoring and point-of-care diagnostics. This comes along with a need for rapid but preferably also green microfabrication. Dry film photoresists (DFPs) promise low-cost and greener microfabrication and can partly or fully replace conventional silicon-technologies being associated with high-energy demands and the intense use of toxic and climate-active chemicals. Due to their mechanical stability and superior film thickness homogeneity, DFPs outperform conventional spin-on photoresists, such as SU-8, especially when three-dimensional architectures are required for micro-analytical devices (e.g. microfluidics). In this study, we utilize the commercial epoxy-based DFP ADEX to demonstrate various application scenarios ranging from the direct modification of microcantilever beams via the assembly of microfluidic channels to lamination-free patterning of DFPs, which employs the DFP directly as a substrate material. Finally, kinked, bottom-up grown silicon nanowires were integrated in this manner as prospective ion-sensitive field-effect transistors in a bio-probe architecture directly on ADEX substrates. Hence, we have developed the required set of microfabrication protocols for such an assembly comprising metal thin film deposition, direct burn-in of lithography alignment markers, and polymer patterning on top of the DFP. | eng |
dc.description.version | publishedVersion | eng |
dc.identifier.uri | https://oa.tib.eu/renate/handle/123456789/8160 | |
dc.identifier.uri | https://doi.org/10.34657/7199 | |
dc.language.iso | eng | eng |
dc.publisher | Berlin ; Heidelberg : Springer | eng |
dc.relation.doi | https://doi.org/10.1007/s40684-021-00367-y | |
dc.relation.essn | 2198-0810 | |
dc.rights.license | CC BY 4.0 Unported | eng |
dc.rights.uri | https://creativecommons.org/licenses/by/4.0/ | eng |
dc.subject.ddc | 620 | eng |
dc.subject.ddc | 624 | eng |
dc.subject.other | 3D Microfabrication | eng |
dc.subject.other | Dry film photoresist | eng |
dc.subject.other | Lab-on-a-chip | eng |
dc.subject.other | Lithography | eng |
dc.subject.other | Microcantilevers | eng |
dc.subject.other | Microprobes | eng |
dc.title | Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists | eng |
dc.type | Article | eng |
dc.type | Text | eng |
tib.accessRights | openAccess | eng |
wgl.contributor | IFWD | eng |
wgl.subject | Ingenieurwissenschaften | eng |
wgl.type | Zeitschriftenartikel | eng |
Files
Original bundle
1 - 1 of 1
Loading...
- Name:
- Towards_Green_3D-Microfabrication.pdf
- Size:
- 2.01 MB
- Format:
- Adobe Portable Document Format
- Description: