In situ nanoparticle diagnostics by multi-wavelength Rayleigh-Mie scattering ellipsometry

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Date
2003
Volume
5
Issue
Journal
New Journal of Physics
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Publisher
[London] : IOP
Abstract

We present and discuss the method of multiple-wavelength Rayleigh-Mie scattering ellipsometry for the in situ analysis of nanoparticles. It is applied to the problem of nanoparticles suspended in low-pressure plasmas. We discuss experimental results demonstrating that the size distribution and the complex refractive index can be determined with high accuracy and present a study on the in situ analysis of etching of melamine-formaldehyde nanoparticles suspended in an oxygen plasma. It is also shown that particles with a shell structure (core plus mantle) can be analysed by Rayleigh-Mie scattering ellipsometry. Rayleigh-Mie scattering ellipsometry is also applicable to in situ analysis of nanoparticles under high gas pressures and in liquids.

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Citation
Gebauer, G., & Winter, J. (2003). In situ nanoparticle diagnostics by multi-wavelength Rayleigh-Mie scattering ellipsometry ([London] : IOP). [London] : IOP. https://doi.org//10.1088/1367-2630/5/1/338
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CC BY-NC-SA 4.0 Unported