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Novel single-source precursors for the fabrication of PbTiO3, PbZrO3 and Pb(Zr1-x Tix)O3 thin-films by chemical vapor deposition
Lead titanate, lead zirconate, and lead zirconate titanate (PZT) films in the sub-μm-range were produced at temperatures around 400 °C using novel single-source precursors in a classical thermal CVD process. The design of two bimetallic alkoxide compounds, a lead titanate and a lead zirconate source with almost identical physical properties and complement miscibility, resulted in a new quasi-single-source PZT precursor, an azeotropic mixture that evaporates at 30 °C and at a pressure of 4 × 10−1 mbar. After thermal treatment at 650 °C, transparent (100)-oriented PZT films with remnant polarization of 20 μC cm−2 and a coercive field strength of 20 V μm−1 were achieved. An additional lead source is not required.
Preparation of acoustic lenses by mechano-chemical synthesis and electrophoretic deposition of lead zirconium titanate (PZT) films
PZT powders has been synthesized via reactive dry milling using PbZrO3 and PbTiO3 as starting materials. Stabel suspensions of the PZT particles in ethanol (d50(Vol) = 115 nm) were obtained by a chemomechanical dispersion step. Teh electrophoretic deposition has been optimized varying the cell voltage and the PZT solid content in the suspension. PZT films have been deposited on platinum coated saphire. After drying, the films are densely packed and free of cracks. By using lithium acetate and lead acetate as a sinter aid it was possible to reduce the sintering temperature to 1050°C. A good electrode has been sputtered onto the piezoelectric films which then have been poled by the corona method. The circular PZT dots (...) with a thickness of 1 µm show the expected oscillation resonance at about 2 GHz and can be used in acoustic lenses, for example in acoustic microscopes.