15 results
Search Results
Now showing 1 - 10 of 15
- ItemChirped photonic crystal for spatially filtered optical feedback to a broad-area laser(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2018) Brée, Carsten; Gailevicius, Darius; Purlys, Vytautas; Werner, Guillermo Garre; Staliunas, Kestutis; Rathsfeld, Andreas; Schmidt, Gunther; Radziunas, MindaugasWe derive and analyze an efficient model for reinjection of spatially filtered optical feedback from an external resonator to a broad area, edge emitting semiconductor laser diode. Spatial filtering is achieved by a chirped photonic crystal, with variable periodicity along the optical axis and negligible resonant backscattering. The optimal chirp is obtained from a genetic algorithm, which yields solutions that are robust against perturbations. Extensive numerical simulations of the composite system with our optoelectronic solver indicate that spatially filtered reinjection enhances lower-order transversal optical modes in the laser diode and, consequently, improves the spatial beam quality.
- ItemConvergence analysis of the FEM coupled with Fourier-mode expansion for the electromagnetic scattering by biperiodic structures(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2012) Hu, Guanghui; Rathsfeld, AndreasScattering of time-harmonic electromagnetic plane waves by a doubly periodic surface structure in R3 can be simulated by a boundary value problem of the time-harmonic curl-curl equation. For a truncated FEM domain, non-local boundary value conditions are required in order to satisfy the radiation conditions for the upper and lower half spaces. Alternatively to boundary integral formulations, to approximate radiation conditions and absorbing boundary methods, Huber et al. [11] have proposed a coupling method based on an idea of Nitsche. In the case of profile gratings with perfectly conducting substrate, the authors have shown previously that a slightly modified variational equation can be proven to be equivalent to the boundary value problem and to be uniquely solvable. Now it is shown that this result can be used to prove convergence for the FEM coupled by truncated wave mode expansion. This result covers transmission gratings and gratings bounded by additional multi-layer systems.
- ItemMathematical modelling of indirect measurements in periodic diffractive optics and scatterometry(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2006) Gross, Hermann; Model, Regine; Bär, Markus; Wurm, Matthias; Bodermann, Bernd; Rathsfeld, AndreasIn this work, we illustrate the benefits and problems of mathematical modelling and effective numerical algorithms to determine the diffraction of light by periodic grating structures. Such models are required for reconstruction of the grating structure from the light diffraction patterns. With decreasing structure dimensions on lithography masks, increasing demands on suitable metrology techniques arise. Methods like scatterometry as a non-imaging indirect optical method offer access to the geometrical parameters of periodic structures including pitch, side-wall angles, line heights, top and bottom widths. The mathematical model for scatterometry is based on the Helmholtz equation derived as a time-harmonic solution of Maxwell's equations. It determines the incident and scattered electric and magnetic fields, which fully specify the light propagation in a periodic two-dimensional grating structure. For numerical simulations of the diffraction patterns, a standard finite element method (FEM) or a generalized finite element method (GFEM) is used for solving the elliptic Helmholtz equation. In a first step, we performed systematic forward calculations for different varying structure parameters to evaluate the applicability and sensitivity of different scatterometric measurement methods ...
- ItemAn inverse problem for fluid-solid interaction(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2007) Elschner, Johannes; Hsiao, George C.; Rathsfeld, AndreasAny acoustic plane wave incident to an elastic obstacle results in a scattered field with a corresponding far field pattern. Mathematically, the scattered field is the solution of a transmission problem coupling the reduced elastodynamic equations over the domain occupied by the obstacle with the Helmholtz equation in the exterior. The far field pattern is obtained applying an integral operator to the scattered field function restricted to a simple smooth surface surrounding the obstacle. The subject of our paper is the inverse problem, where the shape of the elastic body represented by a parametrization of its boundary is to be reconstructed from a finite number of measured far field patterns. We define a family of objective functionals depending on a non-negative regularization parameter such that, for regularization parameter zero, the shape of the sought elastic obstacle is a minimizer of the functional. For any positive regularization parameter, there exists a regularized solution minimizing the functional. Moreover, for the regularization parameter tending to zero, these regularized solutions converge to the solution of the inverse problem provided the latter is uniquely determined by the given far field patterns. The whole approach is based on the variational form of the partial differential operators involved. Hence, numerical approximations can be found applying finite element discretization. Note that, though the transmission problem in its weak formulation may have non-unique solutions for domains with so-called Jones frequencies, the scattered field and its far field pattern is unique and depend continuously on the shape of the obstacle.
- ItemFast scatterometric measurement of periodic surface structures plasma-etching processes(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2018) Klesse, Wolfgang Matthias; Rathsfeld, Andreas; Groß, Claudine; Malguth, Enno; Skibitzki, Oliver; Zealouk, LahbibTo satisfy the continuous demand of ever smaller feature sizes, plasma etching technologies in microelectronics processing enable the fabrication of device structures with dimensions in the nanometer range. In a typical plasma etching system a plasma phase of a selected etching gas is activated, thereby generating highly energetic and reactive gas species which ultimately etch the substrate surface. Such dry etching processes are highly complex and require careful adjustment of many process parameters to meet the high technology requirements on the structure geometry. In this context, real-time access of the structures dimensions during the actual plasma process would be of great benefit by providing full dimension control and film integrity in real-time. In this paper, we evaluate the feasibility of reconstructing the etched dimensions with nanometer precision from reflectivity spectra of the etched surface, which are measured in real-time throughout the entire etch process. We develop and test a novel and fast reconstruction algorithm, using experimental reflection spectra taken about every second during the etch process of a periodic 2D model structure etched into a silicon substrate. Unfortunately, the numerical simulation of the reflectivity by Maxwell solvers is time consuming since it requires separate time-harmonic computations for each wavelength of the spectrum. To reduce the computing time, we propose that a library of spectra should be generated before the etching process. Each spectrum should correspond to a vector of geometry parameters s.t. the vector components scan the possible range of parameter values for the geometrical dimensions. We demonstrate that by replacing the numerically simulated spectra in the reconstruction algorithm by spectra interpolated from the library, it is possible to compute the geometry parameters in times less than a second. Finally, to also reduce memory size and computing time for the library, we reduce the scanning of the parameter values to a sparse grid.
- ItemReflection of plane waves by rough surfaces in the sense of Born approximation(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2012) Arnold, Thomas; Rathsfeld, AndreasThe topic of the present paper is the reflection of electromagnetic plane waves by rough surfaces, i.e., by smooth and bounded perturbations of planar faces. Moreover, the contrast between the cover material and the substrate beneath the rough surface is supposed to be low. In this case, a modification of Stearns' formula based on Born approximation and Fourier techniques is derived for a special class of surfaces. This class contains the graphs of functions if the interface function is a radially modulated almost periodic function. For the Born formula to converge, a sufficient and almost necessary condition is given. A further technical condition is defined, which guarantees the existence of the corresponding far field of the Born approximation. This far field contains plane waves, far-field terms like those for bounded scatterers, and, additionally, a new type of terms. The derived formulas can be used for the fast numerical computations of far fields and for the statistics of random rough
- ItemScattering of time harmonic electromagnetic plane waves by perfectly conducting diffraction gratings(Berlin: Weierstraß-Institut für Angewandte Analysis und Stochastik, 2012) Hu, Guanghui; Rathsfeld, AndreasConsider scattering of time-harmonic lectromagnetic plane waves by a doubly periodic surface in R^3. The medium above the surface is supposed to be homogeneous and isotropic with a constant dielectric coefficient, while below is a perfectly conducting material. This paper is concerned with the existence of quasiperiodic solutions for any frequency of incidence. Based on an equivalent variational formulation established by the mortar technique of Nitsche, we verify the existence of solutions for a broad class of incident waves including plane waves, under the assumption that the grating profile is a Lipschitz biperiodic surface. Our solvability result covers the resonance case where a Rayleigh frequency is allowed. Non-uniqueness examples are also presented in the resonance case and the TE or TM polarization case for classical gratings.
- ItemProfile reconstruction in EUV scatterometry: modeling and uncertainty estimates(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2009) Gross, Hermann; Rathsfeld, Andreas; Scholze, Frank; Bär, MarkusScatterometry as a non-imaging indirect optical method in wafer metrology is also relevant to lithography masks designed for Extreme Ultraviolet Lithography, where light with wavelengths in the range of 13 nm is applied. The solution of the inverse problem, i.e. the determination of periodic surface structures regarding critical dimensions (CD) and other profile properties from light diffraction patterns, is incomplete without knowledge of the uncertainties associated with the reconstructed parameters. With decreasing feature sizes of lithography masks, increasing demands on metrology techniques and their uncertainties arise. The numerical simulation of the diffraction process for periodic 2D structures can be realized by the finite element solution of the two-dimensional Helmholtz equation. For typical EUV masks the ratio period over wave length is so large, that a generalized finite element method has to be used to ensure reliable results with reasonable computational costs ...
- ItemComparison of numerical methods for the reconstruction of elastic obstacles from the far-field data of scattered acoustic waves(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2010) Elschner, Johannes; Hsiao, George C.; Rathsfeld, AndreasWe consider the inverse problem for an elastic body emerged in a fluid due to an acoustic wave. The shape of this obstacle is to be reconstructed from the far-field pattern of the scattered wave. For the numerical solution in the two-dimensional case, we compare a simple Newton type iteration method with the Kirsch-Kress algorithm. Our computational tests reveal that the Kirsch-Kress method converges faster for obstacles with very smooth boundaries. The simple Newton method, however, is more stable in the case of not so smooth domains and more robust with respect to measurement errors.
- ItemAn optimisation method in inverse acoustic scattering by an elastic obstacle(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2008) Elschner, Johannes; Hsiao, George C.; Rathsfeld, AndreasWe consider the interaction between an elastic body and a compressible inviscid fluid, which occupies the unbounded exterior domain. The inverse problem of determining the shape of such an elastic scatterer from the measured far field pattern of the scattered fluid pressure field is of central importance in detecting and identifying submerged objects. Following a method proposed by Kirsch and Kress, we approximate the acoustic and elastodynamic wave by potentials over auxiliary surfaces, and we reformulate the inverse problem as an optimisation problem. The objective function to be minimised is the sum of three terms. The first is the deviation of the approximate far field pattern from the measured one, the second is a regularisation term, and the last a control term for the transmission condition. We prove that the optimisation problem has a solution and that, for the regularisation parameter tending to zero, the minimisers tend to a solution of the inverse problem. In contrast to a numerical method from a previous paper, the presented method does require neither a direct solution method nor an additional treatment of possible Jones modes.