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- ItemComparison of numerical methods for the reconstruction of elastic obstacles from the far-field data of scattered acoustic waves(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2010) Elschner, Johannes; Hsiao, George C.; Rathsfeld, AndreasWe consider the inverse problem for an elastic body emerged in a fluid due to an acoustic wave. The shape of this obstacle is to be reconstructed from the far-field pattern of the scattered wave. For the numerical solution in the two-dimensional case, we compare a simple Newton type iteration method with the Kirsch-Kress algorithm. Our computational tests reveal that the Kirsch-Kress method converges faster for obstacles with very smooth boundaries. The simple Newton method, however, is more stable in the case of not so smooth domains and more robust with respect to measurement errors.
- ItemOn a fast integral equation method for diffraction gratings(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2006) Rathsfeld, Andreas; Schmidt, Gunther; Kleemann, BerndThe integral equation method for the simulation of the diffraction by optical gratings is an efficient numerical tool if profile gratings determined by simple cross-section curves are considered. This method in its recent version is capable to tackle profile curves with corners, gratings with thin coated layers, and diffraction scenarios with unfavorably large ratios period over wavelength. We discuss special implementational issues including the efficient evaluation of the quasi-periodic Green kernels, the quadrature algorithm, and the iterative solution of the arising systems of linear equations. Finally, as application we present the simulation of coated echelle gratings which demonstrates the efficency of our approach.
- ItemModeling of line roughness and its impact on the diffraction intensities and the reconstructed critical dimensions in scatterometry(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2012) Gross, Hermann; Henn, Mark-Alexander; Heidenreich, Sebastian; Rathsfeld, Andreas; Bär, MarkusWe investigate the impact of line edge and line width roughness (LER, LWR) on the measured diffraction intensities in angular resolved extreme ultraviolet (EUV) scatterometry for a periodic line-space structure designed for EUV lithography. LER and LWR with typical amplitudes of a few nanometers were previously neglected in the course of the profile reconstruction. The 2D rigorous numerical simulations of the diffraction process for periodic structures are carried out with the finite element method (FEM) providing a numerical solution of the two-dimensional Helmholtz equation. To model roughness, multiple calculations are performed for domains with large periods, containing many pairs of line and space with stochastically chosen line and space widths. A systematic decrease of the mean efficiencies for higher diffraction orders along with increasing variances is observed and established for different degrees of roughness. ...
- ItemFinite element method to fluid-solid interaction problems with unbounded periodic interfaces(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2014) Hu, Guanghui; Rathsfeld, Andreas; Yin, TaoConsider a time-harmonic acoustic plane wave incident onto a doubly periodic (biperiodic) surface from above. The medium above the surface is supposed to be filled with a homogeneous compressible inviscid fluid of constant mass density, whereas the region below is occupied by an isotropic and linearly elastic solid body characterized by its Lamé constants. This paper is concerned with a variational approach to the fluid-solid interaction problems with unbounded biperiodic Lipschitz interfaces between the domains of the acoustic and elastic waves. The existence of quasi-periodic solutions in Sobolev spaces is established at arbitrary frequency of incidence, while uniqueness is proved only for small frequencies or for all frequencies excluding a discrete set. A finite element scheme coupled with Dirichlet-to-Neumann mappings is proposed. The Dirichlet-to-Neumann mappings are approximated by truncated Rayleigh series expansions, and, finally, numerical tests in 2D are performed.
- ItemProfile reconstruction in EUV scatterometry: modeling and uncertainty estimates(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2009) Gross, Hermann; Rathsfeld, Andreas; Scholze, Frank; Bär, MarkusScatterometry as a non-imaging indirect optical method in wafer metrology is also relevant to lithography masks designed for Extreme Ultraviolet Lithography, where light with wavelengths in the range of 13 nm is applied. The solution of the inverse problem, i.e. the determination of periodic surface structures regarding critical dimensions (CD) and other profile properties from light diffraction patterns, is incomplete without knowledge of the uncertainties associated with the reconstructed parameters. With decreasing feature sizes of lithography masks, increasing demands on metrology techniques and their uncertainties arise. The numerical simulation of the diffraction process for periodic 2D structures can be realized by the finite element solution of the two-dimensional Helmholtz equation. For typical EUV masks the ratio period over wave length is so large, that a generalized finite element method has to be used to ensure reliable results with reasonable computational costs ...
- ItemSensitivity analysis for indirect measurement in scatterometry and the reconstruction of periodic grating structures(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2006) Gross, Hermann; Rathsfeld, AndreasIn this work, we discuss some aspects of numerical algorithms for the determination of periodic surface structures (gratings) from light diffraction patterns. With decreasing structure details of lithography masks, increasing demands on suitable metrology techniques arise. Methods like scatterometry as a non-imaging indirect optical method are applied to simple periodic line structures in order to evaluate the quality of the manufacturing process. Using scatterometry, geometrical parameters of periodic structures including period (pitch), side-wall angles, heights, top and bottom widths of trapezoid shaped bridges can be determined. The mathematical model for the scattering is based on the time-harmonic Maxwell's equations and reduces in case of grating structures to the Helmholtz equation. For the numerical simulation, e.g. finite element methods can be applied to solve the corresponding boundary value problems. More challenging is the inverse problem, where the grating geometry is to be reconstructed from the measured diffraction patterns. Restricting the class of gratings and the set of measurements ...
- ItemChirped photonic crystal for spatially filtered optical feedback to a broad-area laser(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2018) Brée, Carsten; Gailevicius, Darius; Purlys, Vytautas; Werner, Guillermo Garre; Staliunas, Kestutis; Rathsfeld, Andreas; Schmidt, Gunther; Radziunas, MindaugasWe derive and analyze an efficient model for reinjection of spatially filtered optical feedback from an external resonator to a broad area, edge emitting semiconductor laser diode. Spatial filtering is achieved by a chirped photonic crystal, with variable periodicity along the optical axis and negligible resonant backscattering. The optimal chirp is obtained from a genetic algorithm, which yields solutions that are robust against perturbations. Extensive numerical simulations of the composite system with our optoelectronic solver indicate that spatially filtered reinjection enhances lower-order transversal optical modes in the laser diode and, consequently, improves the spatial beam quality.
- ItemAn inverse problem for fluid-solid interaction(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2007) Elschner, Johannes; Hsiao, George C.; Rathsfeld, AndreasAny acoustic plane wave incident to an elastic obstacle results in a scattered field with a corresponding far field pattern. Mathematically, the scattered field is the solution of a transmission problem coupling the reduced elastodynamic equations over the domain occupied by the obstacle with the Helmholtz equation in the exterior. The far field pattern is obtained applying an integral operator to the scattered field function restricted to a simple smooth surface surrounding the obstacle. The subject of our paper is the inverse problem, where the shape of the elastic body represented by a parametrization of its boundary is to be reconstructed from a finite number of measured far field patterns. We define a family of objective functionals depending on a non-negative regularization parameter such that, for regularization parameter zero, the shape of the sought elastic obstacle is a minimizer of the functional. For any positive regularization parameter, there exists a regularized solution minimizing the functional. Moreover, for the regularization parameter tending to zero, these regularized solutions converge to the solution of the inverse problem provided the latter is uniquely determined by the given far field patterns. The whole approach is based on the variational form of the partial differential operators involved. Hence, numerical approximations can be found applying finite element discretization. Note that, though the transmission problem in its weak formulation may have non-unique solutions for domains with so-called Jones frequencies, the scattered field and its far field pattern is unique and depend continuously on the shape of the obstacle.
- ItemReflection of plane waves by rough surfaces in the sense of Born approximation(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2012) Arnold, Thomas; Rathsfeld, AndreasThe topic of the present paper is the reflection of electromagnetic plane waves by rough surfaces, i.e., by smooth and bounded perturbations of planar faces. Moreover, the contrast between the cover material and the substrate beneath the rough surface is supposed to be low. In this case, a modification of Stearns' formula based on Born approximation and Fourier techniques is derived for a special class of surfaces. This class contains the graphs of functions if the interface function is a radially modulated almost periodic function. For the Born formula to converge, a sufficient and almost necessary condition is given. A further technical condition is defined, which guarantees the existence of the corresponding far field of the Born approximation. This far field contains plane waves, far-field terms like those for bounded scatterers, and, additionally, a new type of terms. The derived formulas can be used for the fast numerical computations of far fields and for the statistics of random rough
- ItemScattering of time harmonic electromagnetic plane waves by perfectly conducting diffraction gratings(Berlin: Weierstraß-Institut für Angewandte Analysis und Stochastik, 2012) Hu, Guanghui; Rathsfeld, AndreasConsider scattering of time-harmonic lectromagnetic plane waves by a doubly periodic surface in R^3. The medium above the surface is supposed to be homogeneous and isotropic with a constant dielectric coefficient, while below is a perfectly conducting material. This paper is concerned with the existence of quasiperiodic solutions for any frequency of incidence. Based on an equivalent variational formulation established by the mortar technique of Nitsche, we verify the existence of solutions for a broad class of incident waves including plane waves, under the assumption that the grating profile is a Lipschitz biperiodic surface. Our solvability result covers the resonance case where a Rayleigh frequency is allowed. Non-uniqueness examples are also presented in the resonance case and the TE or TM polarization case for classical gratings.