Search Results
Modeling of line roughness and its impact on the diffraction intensities and the reconstructed critical dimensions in scatterometry
We investigate the impact of line edge and line width roughness (LER, LWR) on the measured diffraction intensities in angular resolved extreme ultraviolet (EUV) scatterometry for a periodic line-space structure designed for EUV lithography. LER and LWR with typical amplitudes of a few nanometers were previously neglected in the course of the profile reconstruction. The 2D rigorous numerical simulations of the diffraction process for periodic structures are carried out with the finite element method (FEM) providing a numerical solution of the two-dimensional Helmholtz equation. To model roughness, multiple calculations are performed for domains with large periods, containing many pairs of line and space with stochastically chosen line and space widths. A systematic decrease of the mean efficiencies for higher diffraction orders along with increasing variances is observed and established for different degrees of roughness. ...
Direct and inverse elastic scattering problems for diffraction gratings
This paper is concerned with the direct and inverse scattering of time-harmonic plane elastic waves by unbounded periodic structures (diffraction gratings). We present a variational approach to the forward scattering problems with Lipschitz grating profiles and give a survey of recent uniqueness and existence results. We also report on recent global uniqueness results within the class of piecewise linear grating profiles for the corresponding inverse elastic scattering problems. Moreover, a discrete Galerkin method is presented to efficiently approximate solutions of direct scattering problems via an integral equation approach. Finally, an optimization method for solving the inverse problem of recovering a 2D periodic structure from scattered elastic waves measured above the structure is discussed.