2020, Berzinš, Jona, Indrišiūna, Simonas, Fasold, Stefan, Steinert, Michael, Žukovskaja, Olga, Cialla-May, Dana, Gečys, Paulius, Bäumer, Stefan M.B., Pertsch, Thomas, Setzpfandt, Frank

Optically resonant high-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances are usually fabricated by means of planar technologies, which limit the degrees of freedom in tunability and scalability of the fabricated systems. Therefore, we propose a complimentary post-processing technique based on ultrashort (= 10 ps) laser pulses. The process involves thermal effects: crystallization and reshaping, while the heat is localized by a high-precision positioning of the focused laser beam. Moreover, for the first time, the resonant behavior of dielectric metasurface elements is exploited to engineer a specific absorption profile, which leads to a spatially-selective heating and a customized modification. Such technique has the potential to reduce the complexity in the fabrication of non-uniform metasurface-based optical elements. Two distinct cases, a spatial pixelation of a large-scale metasurface and a height modification of metasurface elements, are explicitly demonstrated. © 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement