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Self-Assembled Flexible and Integratable 3D Microtubular Asymmetric Supercapacitors

2019, Li, F., Wang, J., Liu, L., Qu, J., Li, Y., Bandari, V.K., Karnaushenko, D., Becker, C., Faghih, M., Kang, T., Baunack, S., Zhu, M., Zhu, F., Schmidt, O.G.

The rapid development of microelectronics has equally rapidly increased the demand for miniaturized energy storage devices. On-chip microsupercapacitors (MSCs), as promising power candidates, possess great potential to complement or replace electrolytic capacitors and microbatteries in various applications. However, the areal capacities and energy densities of the planar MSCs are commonly limited by the low voltage window, the thin layer of the electrode materials and complex fabrication processes. Here, a new-type three-dimensional (3D) tubular asymmetric MSC with small footprint area, high potential window, ultrahigh areal energy density, and long-term cycling stability is fabricated with shapeable materials and photolithographic technologies, which are compatible with modern microelectronic fabrication procedures widely used in industry. Benefiting from the novel architecture, the 3D asymmetric MSC displays an ultrahigh areal capacitance of 88.6 mF cm−2 and areal energy density of 28.69 mW h cm−2, superior to most reported interdigitated MSCs. Furthermore, the 3D tubular MSCs demonstrate remarkable cycling stability and the capacitance retention is up to 91.8% over 12 000 cycles. It is believed that the efficient fabrication methodology can be used to construct various integratable microscale tubular energy storage devices with small footprint area and high performance for miniaturized electronics.

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Photoactive rolled-up TiO2 microtubes: Fabrication, characterization and applications

2014, Giudicatti, S., Marz, S.M., Soler, L., Madani, A., Jorgensen, M.R., Sanchez, S., Schmidt, O.G.

Because of its unique properties, titania (TiO2) represents a promising candidate in a wide variety of research fields. In this paper, some of the properties and potential applications of titania within rolled-up nanotechnology are explored. It is shown how the structural and optical properties of rolled titania microtubes can be controlled by properly tuning the microfabrication parameters. The rolling up of titania films on different sacrificial layers and containing different shapes, achieving a control on the diameter of the fabricated titania microtubes, is presented. In order to obtain the more photoactive crystalline form of titania, one during-fabrication and two post-fabrication methods are demonstrated. Interesting applications in the fields of photocatalysis and photonics are suggested: the use of titania rolled-up microtubes as micromotors and optical microresonators is presented.

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Soft Inkjet Circuits: Rapid Multi-Material Fabrication of Soft Circuits using a Commodity Inkjet Printer

2019, Khan, Arshad, Roo, Joan Sol, Kraus, Tobias, Steimle, Jürgen

Despite the increasing popularity of soft interactive devices, their fabrication remains complex and time consuming. We contribute a process for rapid do-it-yourself fabrication of soft circuits using a conventional desktop inkjet printer. It supports inkjet printing of circuits that are stretchable, ultrathin, high resolution, and integrated with a wide variety of materials used for prototyping. We introduce multi-ink functional printing on a desktop printer for realizing multi-material devices, including conductive and isolating inks. We further present DIY techniques to enhance compatibility between inks and substrates and the circuits' elasticity. This enables circuits on a wide set of materials including temporary tattoo paper, textiles, and thermoplastic. Four application cases demonstrate versatile uses for realizing stretchable devices, e-textiles, body-based and re-shapeable interfaces.

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Lateral Selective SiGe Growth for Local Dislocation-Free SiGe-on-Insulator Virtual Substrate Fabrication

2023, Anand, K., Schubert, M.A., Corley-Wiciak, A.A., Spirito, D., Corley-Wiciak, C., Klesse, W.M., Mai, A., Tillack, B., Yamamoto, Y.

Dislocation free local SiGe-on-insulator (SGOI) virtual substrate is fabricated using lateral selective SiGe growth by reduced pressure chemical vapor deposition. The lateral selective SiGe growth is performed around a ∼1.25 μm square Si (001) pillar in a cavity formed by HCl vapor phase etching of Si at 850 °C from side of SiO2/Si mesa structure on buried oxide. Smooth root mean square roughness of SiGe surface of 0.14 nm, which is determined by interface roughness between the sacrificially etched Si and the SiO2 cap, is obtained. Uniform Ge content of ∼40% in the laterally grown SiGe is observed. In the Si pillar, tensile strain of ∼0.65% is found which could be due to thermal expansion difference between SiO2 and Si. In the SiGe, tensile strain of ∼1.4% along 〈010〉 direction, which is higher compared to that along 〈110〉 direction, is observed. The tensile strain is induced from both [110] and [−110] directions. Threading dislocations in the SiGe are located only ∼400 nm from Si pillar and stacking faults are running towards 〈110〉 directions, resulting in the formation of a wide dislocation-free area in SiGe along 〈010〉 due to horizontal aspect ratio trapping.

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Ultrafast laser inscription of asymmetric integrated waveguide 3 dB couplers for astronomical K-band interferometry at the CHARA array

2021, Benoît, Aurélien, Pike, Fraser A., Sharma, Tarun K., MacLachlan, David G., Dinkelaker, Aline N., Nayak, Abani S., Madhav, Kalaga, Roth, Martin M., Labadie, Lucas, Pedretti, Ettore, Brummelaar, Theo A. ten, Scott, Nic, Coudé du Foresto, Vincent, Thomson, Robert R.

We present the fabrication and characterization of 3 dB asymmetric directional couplers for the astronomical K-band at wavelengths between 2.0 and 2.4 µm. The couplers were fabricated in commercial Infrasil silica glass using an ultrafast laser operating at 1030 nm. After optimizing the fabrication parameters, the insertion losses of straight single-mode waveguides were measured to be ∼1.2±0.5dB across the full K-band. We investigate the development of asymmetric 3 dB directional couplers by varying the coupler interaction lengths and by varying the width of one of the waveguide cores to detune the propagation constants of the coupled modes. In this manner, we demonstrate that ultrafast laser inscription is capable of fabricating asymmetric 3 dB directional couplers for future applications in K-band stellar interferometry. Finally, we demonstrate that our couplers exhibit an interferometric fringe contrast of >90%. This technology paves the path for the development of a two-telescope K-band integrated optic beam combiner for interferometry to replace the existing beam combiner (MONA) in Jouvence of the Fiber Linked Unit for Recombination (JouFLU) at the Center for High Angular Resolution Astronomy (CHARA) telescope array.

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Merging Top-Down and Bottom-Up Approaches to Fabricate Artificial Photonic Nanomaterials with a Deterministic Electric and Magnetic Response

2020, Dietrich K., Zilk M., Steglich M., Siefke T., Hübner U., Pertsch T., Rockstuhl C., Tünnermann A., Kley E.-B.

Artificial photonic nanomaterials made from densely packed scatterers are frequently realized either by top-down or bottom-up techniques. While top-down techniques offer unprecedented control over achievable geometries for the scatterers, by trend they suffer from being limited to planar and periodic structures. In contrast, materials fabricated with bottom-up techniques do not suffer from such disadvantages but, unfortunately, they offer only little control on achievable geometries for the scatterers. To overcome these limitations, a nanofabrication strategy is introduced that merges both approaches. A large number of scatterers are fabricated with a tailored optical response by fast character projection electron-beam lithography and are embedded into a membrane. By peeling-off this membrane from the substrate, scrambling, and densifying it, a bulk material comprising densely packed and randomly arranged scatterers is obtained. The fabrication of an isotropic material from these scatterers with a strong electric and magnetic response is demonstrated. The approach of this study unlocks novel opportunities to fabricate nanomaterials with a complex optical response in the bulk but also on top of arbitrarily shaped surfaces. © 2019 The Authors. Published by WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim