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A high resolution extreme ultraviolet spectrometer system optimized for harmonic spectroscopy and XUV beam analysis
2019, Wünsche, Martin, Fuchs, Silvio, Weber, Thomas, Nathanael, Jan, Abel, Johann J., Reinhard, Julius, Wiesner, Felix, Hübner, Uwe, Skruszewicz, Slawomir J., Paulus, Gerhard G., Rödel, Christian
We present a modular extreme ultraviolet (XUV) spectrometer system optimized for a broad spectral range of 12-41 nm (30-99 eV) with a high spectral resolution of λ/Δλ 784 ± 89. The spectrometer system has several operation modes for (1) XUV beam inspection, (2) angular spectral analysis, and (3) imaging spectroscopy. These options allow for a versatile use in high harmonic spectroscopy and XUV beam analysis. The high performance of the spectrometer is demonstrated using a novel cross-sectional imaging method called XUV coherence tomography. © 2019 Author(s).