2011, Deneke, C., Wild, E., Boldyreva, K., Baunack, S., Cendula, P., Mönch, I., Simon, M., Malachias, A., Dörr, K., Schmidt, O.G.

Three-dimensional micro-objects are fabricated by the controlled release of inherently strained SrRuO 3/Pr 0.7Ca 0.3MnO 3/SrRuO 3 nanometer-sized trilayers from SrTiO 3 (001) substrates. Freestanding cantilevers and rolled-up microtubes with a diameter of 6 to 8 μm are demonstrated. The etching behavior of the SrRuO3 film is investigated, and a selectivity of 1:9,100 with respect to the SrTiO3 substrate is found. The initial and final strain states of the rolled-up oxide layers are studied by X-ray diffraction on an ensemble of tubes. Relaxation of the sandwiched Pr0.7Ca0.3MnO3 layer towards its bulk lattice parameter is observed as the major driving force for the roll-up of the trilayers. Finally, μ-diffraction experiments reveal that a single object can represent the ensemble proving a good homogeneity of the rolled-up tubes.

2022, Zhang, Xuan, Wang, Yue, Tian, Zhihao, Samri, Manar, Moh, Karsten, McMeeking, Robert M., Hensel, René, Arzt, Eduard

Micro-objects stick tenaciously to each other—a well-known show-stopper in microtechnology and in handling micro-objects. Inspired by the trigger plant, we explore a mechanical metastructure for overcoming adhesion involving a snap-action mechanism. We analyze the nonlinear mechanical response of curved beam architectures clamped by a tunable spring, incorporating mono- and bistable states. As a result, reversible miniaturized snap-through devices are successfully realized by micron-scale direct printing, and successful pick-and-place handling of a micro-object is demonstrated. The technique is applicable to universal scenarios, including dry and wet environment, or smooth and rough counter surfaces. With an unprecedented switching ratio (between high and low adhesion) exceeding 104, this concept proposes an efficient paradigm for handling and placing superlight objects.