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Aktas, Cenk
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Bender, Michael
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Bubel, Carsten
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Veith, Michael
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Single Source Precursor
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Chemical Vapour Deposition
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Physical Vapor Deposition
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2010
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Saarbrücke : Leibniz-Institut für Neue Materialien
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Subject: Single Source Precursor
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Single source precursors for piezoelectric and optical coatings
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2010
,
Veith, Michael
,
Bender, Michael
,
Bubel, Carsten
,
Aktas, Cenk
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[no abstract available]
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