Browsing by Author "Rathsfeld, Andreas"
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- ItemChirped photonic crystal for spatially filtered optical feedback to a broad-area laser(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2018) Brée, Carsten; Gailevicius, Darius; Purlys, Vytautas; Werner, Guillermo Garre; Staliunas, Kestutis; Rathsfeld, Andreas; Schmidt, Gunther; Radziunas, MindaugasWe derive and analyze an efficient model for reinjection of spatially filtered optical feedback from an external resonator to a broad area, edge emitting semiconductor laser diode. Spatial filtering is achieved by a chirped photonic crystal, with variable periodicity along the optical axis and negligible resonant backscattering. The optimal chirp is obtained from a genetic algorithm, which yields solutions that are robust against perturbations. Extensive numerical simulations of the composite system with our optoelectronic solver indicate that spatially filtered reinjection enhances lower-order transversal optical modes in the laser diode and, consequently, improves the spatial beam quality.
- ItemComparison of numerical methods for the reconstruction of elastic obstacles from the far-field data of scattered acoustic waves(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2010) Elschner, Johannes; Hsiao, George C.; Rathsfeld, AndreasWe consider the inverse problem for an elastic body emerged in a fluid due to an acoustic wave. The shape of this obstacle is to be reconstructed from the far-field pattern of the scattered wave. For the numerical solution in the two-dimensional case, we compare a simple Newton type iteration method with the Kirsch-Kress algorithm. Our computational tests reveal that the Kirsch-Kress method converges faster for obstacles with very smooth boundaries. The simple Newton method, however, is more stable in the case of not so smooth domains and more robust with respect to measurement errors.
- ItemConvergence analysis of the FEM coupled with Fourier-mode expansion for the electromagnetic scattering by biperiodic structures(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2012) Hu, Guanghui; Rathsfeld, AndreasScattering of time-harmonic electromagnetic plane waves by a doubly periodic surface structure in R3 can be simulated by a boundary value problem of the time-harmonic curl-curl equation. For a truncated FEM domain, non-local boundary value conditions are required in order to satisfy the radiation conditions for the upper and lower half spaces. Alternatively to boundary integral formulations, to approximate radiation conditions and absorbing boundary methods, Huber et al. [11] have proposed a coupling method based on an idea of Nitsche. In the case of profile gratings with perfectly conducting substrate, the authors have shown previously that a slightly modified variational equation can be proven to be equivalent to the boundary value problem and to be uniquely solvable. Now it is shown that this result can be used to prove convergence for the FEM coupled by truncated wave mode expansion. This result covers transmission gratings and gratings bounded by additional multi-layer systems.
- ItemFast scatterometric measurement of periodic surface structures plasma-etching processes(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2018) Klesse, Wolfgang Matthias; Rathsfeld, Andreas; Groß, Claudine; Malguth, Enno; Skibitzki, Oliver; Zealouk, LahbibTo satisfy the continuous demand of ever smaller feature sizes, plasma etching technologies in microelectronics processing enable the fabrication of device structures with dimensions in the nanometer range. In a typical plasma etching system a plasma phase of a selected etching gas is activated, thereby generating highly energetic and reactive gas species which ultimately etch the substrate surface. Such dry etching processes are highly complex and require careful adjustment of many process parameters to meet the high technology requirements on the structure geometry. In this context, real-time access of the structures dimensions during the actual plasma process would be of great benefit by providing full dimension control and film integrity in real-time. In this paper, we evaluate the feasibility of reconstructing the etched dimensions with nanometer precision from reflectivity spectra of the etched surface, which are measured in real-time throughout the entire etch process. We develop and test a novel and fast reconstruction algorithm, using experimental reflection spectra taken about every second during the etch process of a periodic 2D model structure etched into a silicon substrate. Unfortunately, the numerical simulation of the reflectivity by Maxwell solvers is time consuming since it requires separate time-harmonic computations for each wavelength of the spectrum. To reduce the computing time, we propose that a library of spectra should be generated before the etching process. Each spectrum should correspond to a vector of geometry parameters s.t. the vector components scan the possible range of parameter values for the geometrical dimensions. We demonstrate that by replacing the numerically simulated spectra in the reconstruction algorithm by spectra interpolated from the library, it is possible to compute the geometry parameters in times less than a second. Finally, to also reduce memory size and computing time for the library, we reduce the scanning of the parameter values to a sparse grid.
- ItemFinite element method to fluid-solid interaction problems with unbounded periodic interfaces(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2014) Hu, Guanghui; Rathsfeld, Andreas; Yin, TaoConsider a time-harmonic acoustic plane wave incident onto a doubly periodic (biperiodic) surface from above. The medium above the surface is supposed to be filled with a homogeneous compressible inviscid fluid of constant mass density, whereas the region below is occupied by an isotropic and linearly elastic solid body characterized by its Lamé constants. This paper is concerned with a variational approach to the fluid-solid interaction problems with unbounded biperiodic Lipschitz interfaces between the domains of the acoustic and elastic waves. The existence of quasi-periodic solutions in Sobolev spaces is established at arbitrary frequency of incidence, while uniqueness is proved only for small frequencies or for all frequencies excluding a discrete set. A finite element scheme coupled with Dirichlet-to-Neumann mappings is proposed. The Dirichlet-to-Neumann mappings are approximated by truncated Rayleigh series expansions, and, finally, numerical tests in 2D are performed.
- ItemAn inverse problem for fluid-solid interaction(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2007) Elschner, Johannes; Hsiao, George C.; Rathsfeld, AndreasAny acoustic plane wave incident to an elastic obstacle results in a scattered field with a corresponding far field pattern. Mathematically, the scattered field is the solution of a transmission problem coupling the reduced elastodynamic equations over the domain occupied by the obstacle with the Helmholtz equation in the exterior. The far field pattern is obtained applying an integral operator to the scattered field function restricted to a simple smooth surface surrounding the obstacle. The subject of our paper is the inverse problem, where the shape of the elastic body represented by a parametrization of its boundary is to be reconstructed from a finite number of measured far field patterns. We define a family of objective functionals depending on a non-negative regularization parameter such that, for regularization parameter zero, the shape of the sought elastic obstacle is a minimizer of the functional. For any positive regularization parameter, there exists a regularized solution minimizing the functional. Moreover, for the regularization parameter tending to zero, these regularized solutions converge to the solution of the inverse problem provided the latter is uniquely determined by the given far field patterns. The whole approach is based on the variational form of the partial differential operators involved. Hence, numerical approximations can be found applying finite element discretization. Note that, though the transmission problem in its weak formulation may have non-unique solutions for domains with so-called Jones frequencies, the scattered field and its far field pattern is unique and depend continuously on the shape of the obstacle.
- ItemMathematical modelling of indirect measurements in periodic diffractive optics and scatterometry(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2006) Gross, Hermann; Model, Regine; Bär, Markus; Wurm, Matthias; Bodermann, Bernd; Rathsfeld, AndreasIn this work, we illustrate the benefits and problems of mathematical modelling and effective numerical algorithms to determine the diffraction of light by periodic grating structures. Such models are required for reconstruction of the grating structure from the light diffraction patterns. With decreasing structure dimensions on lithography masks, increasing demands on suitable metrology techniques arise. Methods like scatterometry as a non-imaging indirect optical method offer access to the geometrical parameters of periodic structures including pitch, side-wall angles, line heights, top and bottom widths. The mathematical model for scatterometry is based on the Helmholtz equation derived as a time-harmonic solution of Maxwell's equations. It determines the incident and scattered electric and magnetic fields, which fully specify the light propagation in a periodic two-dimensional grating structure. For numerical simulations of the diffraction patterns, a standard finite element method (FEM) or a generalized finite element method (GFEM) is used for solving the elliptic Helmholtz equation. In a first step, we performed systematic forward calculations for different varying structure parameters to evaluate the applicability and sensitivity of different scatterometric measurement methods ...
- ItemModeling of line roughness and its impact on the diffraction intensities and the reconstructed critical dimensions in scatterometry(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2012) Gross, Hermann; Henn, Mark-Alexander; Heidenreich, Sebastian; Rathsfeld, Andreas; Bär, MarkusWe investigate the impact of line edge and line width roughness (LER, LWR) on the measured diffraction intensities in angular resolved extreme ultraviolet (EUV) scatterometry for a periodic line-space structure designed for EUV lithography. LER and LWR with typical amplitudes of a few nanometers were previously neglected in the course of the profile reconstruction. The 2D rigorous numerical simulations of the diffraction process for periodic structures are carried out with the finite element method (FEM) providing a numerical solution of the two-dimensional Helmholtz equation. To model roughness, multiple calculations are performed for domains with large periods, containing many pairs of line and space with stochastically chosen line and space widths. A systematic decrease of the mean efficiencies for higher diffraction orders along with increasing variances is observed and established for different degrees of roughness. ...
- ItemOn a fast integral equation method for diffraction gratings(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2006) Rathsfeld, Andreas; Schmidt, Gunther; Kleemann, BerndThe integral equation method for the simulation of the diffraction by optical gratings is an efficient numerical tool if profile gratings determined by simple cross-section curves are considered. This method in its recent version is capable to tackle profile curves with corners, gratings with thin coated layers, and diffraction scenarios with unfavorably large ratios period over wavelength. We discuss special implementational issues including the efficient evaluation of the quasi-periodic Green kernels, the quadrature algorithm, and the iterative solution of the arising systems of linear equations. Finally, as application we present the simulation of coated echelle gratings which demonstrates the efficency of our approach.
- ItemOn a half-space radiation condition(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2019) Rathsfeld, AndreasFor the Dirichlet problem of the Helmholtz equation over the half space or rough surfaces, a radiation condition is needed to guarantee a unique solution, which is physically meaningful. If the Dirichlet data is a general bounded continuous function, then the well-established Sommerfeld radiation condition, the angular spectrum representation, and the upward propagating radiation condition do not apply or require restrictions on the data, in order to define the involved integrals. In this paper a new condition based on a representation of the second derivative of the solution is proposed. The twice differentiable half-space Green's function is integrable and the corresponding radiation condition applies to general bounded functions. The condition is checked for special functions like plane waves and point source solution. Moreover, the Dirichlet problem for the half plane is discussed. Note that such a ``continuous'' radiation condition is helpful e.g. if finite sections of the rough-surface problem are analyzed.
- ItemAn optimisation method in inverse acoustic scattering by an elastic obstacle(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2008) Elschner, Johannes; Hsiao, George C.; Rathsfeld, AndreasWe consider the interaction between an elastic body and a compressible inviscid fluid, which occupies the unbounded exterior domain. The inverse problem of determining the shape of such an elastic scatterer from the measured far field pattern of the scattered fluid pressure field is of central importance in detecting and identifying submerged objects. Following a method proposed by Kirsch and Kress, we approximate the acoustic and elastodynamic wave by potentials over auxiliary surfaces, and we reformulate the inverse problem as an optimisation problem. The objective function to be minimised is the sum of three terms. The first is the deviation of the approximate far field pattern from the measured one, the second is a regularisation term, and the last a control term for the transmission condition. We prove that the optimisation problem has a solution and that, for the regularisation parameter tending to zero, the minimisers tend to a solution of the inverse problem. In contrast to a numerical method from a previous paper, the presented method does require neither a direct solution method nor an additional treatment of possible Jones modes.
- ItemPML and high-accuracy boundary integral equation solver for wave scattering by a locally defected periodic surface(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2021) Yu, Xiuchen; Hu, Guanghui; Lu, Wangtao; Rathsfeld, AndreasThis paper studies the perfectly-matched-layer (PML) method for wave scattering in a half space of homogeneous medium bounded by a two-dimensional, perfectly conducting, and locally defected periodic surface, and develops a high-accuracy boundary-integral-equation (BIE) solver. Along the vertical direction, we place a PML to truncate the unbounded domain onto a strip and prove that the PML solution converges to the true solution in the physical subregion of the strip with an error bounded by the reciprocal PML thickness. Laterally, we divide the unbounded strip into three regions: a region containing the defect and two semi-waveguide regions, separated by two vertical line segments. In both semi-waveguides, we prove the well-posedness of an associated scattering problem so as to well define a Neumann-to-Dirichlet (NtD) operator on the associated vertical segment. The two NtD operators, serving as exact lateral boundary conditions, reformulate the unbounded strip problem as a boundary value problem over the defected region. Due to the periodicity of the semi-waveguides, both NtD operators turn out to be closely related to a Neumann-marching operator, governed by a nonlinear Riccati equation. It is proved that the Neumann-marching operators are contracting, so that the PML solution decays exponentially fast along both lateral directions. The consequences culminate in two opposite aspects. Negatively, the PML solution cannot converge exponentially to the true solution in the whole physical region of the strip. Positively, from a numerical perspective, the Riccati equations can now be efficiently solved by a recursive doubling procedure and a high-accuracy PML-based BIE method so that the boundary value problem on the defected region can be solved efficiently and accurately. Numerical experiments demonstrate that the PML solution converges exponentially fast to the true solution in any compact subdomain of the strip.
- ItemProfile reconstruction in EUV scatterometry: modeling and uncertainty estimates(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2009) Gross, Hermann; Rathsfeld, Andreas; Scholze, Frank; Bär, MarkusScatterometry as a non-imaging indirect optical method in wafer metrology is also relevant to lithography masks designed for Extreme Ultraviolet Lithography, where light with wavelengths in the range of 13 nm is applied. The solution of the inverse problem, i.e. the determination of periodic surface structures regarding critical dimensions (CD) and other profile properties from light diffraction patterns, is incomplete without knowledge of the uncertainties associated with the reconstructed parameters. With decreasing feature sizes of lithography masks, increasing demands on metrology techniques and their uncertainties arise. The numerical simulation of the diffraction process for periodic 2D structures can be realized by the finite element solution of the two-dimensional Helmholtz equation. For typical EUV masks the ratio period over wave length is so large, that a generalized finite element method has to be used to ensure reliable results with reasonable computational costs ...
- ItemRadiation conditions for the Helmholtz equation in a half plane filled by inhomogeneous periodic material(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2020) Hu, Guanghui; Rathsfeld, AndreasIn this paper we consider time-harmonic acoustic wave propagation in a half-plane filled by inhomogeneous periodic medium. If the refractive index depends on the horizontal coordinate only, we define upward and downward radiating modes by solving a one-dimensional Sturm-Liouville eigenvalue problem with a complex-valued periodic coefficient. The upward and downward radiation conditions are introduced based on a generalized Rayleigh series. Using the variational method, we then prove uniqueness and existence for the scattering of an incoming wave mode by a grating located between an upper and lower half plane with such inhomogeneous periodic media. Finally, we discuss the application of the new radiation conditions to the scattering matrix algorithm, i.e., to rigorous coupled wave analysis or Fourier modal method.
- ItemReflection of plane waves by rough surfaces in the sense of Born approximation(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2012) Arnold, Thomas; Rathsfeld, AndreasThe topic of the present paper is the reflection of electromagnetic plane waves by rough surfaces, i.e., by smooth and bounded perturbations of planar faces. Moreover, the contrast between the cover material and the substrate beneath the rough surface is supposed to be low. In this case, a modification of Stearns' formula based on Born approximation and Fourier techniques is derived for a special class of surfaces. This class contains the graphs of functions if the interface function is a radially modulated almost periodic function. For the Born formula to converge, a sufficient and almost necessary condition is given. A further technical condition is defined, which guarantees the existence of the corresponding far field of the Born approximation. This far field contains plane waves, far-field terms like those for bounded scatterers, and, additionally, a new type of terms. The derived formulas can be used for the fast numerical computations of far fields and for the statistics of random rough
- ItemScattering of time harmonic electromagnetic plane waves by perfectly conducting diffraction gratings(Berlin: Weierstraß-Institut für Angewandte Analysis und Stochastik, 2012) Hu, Guanghui; Rathsfeld, AndreasConsider scattering of time-harmonic lectromagnetic plane waves by a doubly periodic surface in R^3. The medium above the surface is supposed to be homogeneous and isotropic with a constant dielectric coefficient, while below is a perfectly conducting material. This paper is concerned with the existence of quasiperiodic solutions for any frequency of incidence. Based on an equivalent variational formulation established by the mortar technique of Nitsche, we verify the existence of solutions for a broad class of incident waves including plane waves, under the assumption that the grating profile is a Lipschitz biperiodic surface. Our solvability result covers the resonance case where a Rayleigh frequency is allowed. Non-uniqueness examples are also presented in the resonance case and the TE or TM polarization case for classical gratings.
- ItemSensitivity analysis for indirect measurement in scatterometry and the reconstruction of periodic grating structures(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2006) Gross, Hermann; Rathsfeld, AndreasIn this work, we discuss some aspects of numerical algorithms for the determination of periodic surface structures (gratings) from light diffraction patterns. With decreasing structure details of lithography masks, increasing demands on suitable metrology techniques arise. Methods like scatterometry as a non-imaging indirect optical method are applied to simple periodic line structures in order to evaluate the quality of the manufacturing process. Using scatterometry, geometrical parameters of periodic structures including period (pitch), side-wall angles, heights, top and bottom widths of trapezoid shaped bridges can be determined. The mathematical model for the scattering is based on the time-harmonic Maxwell's equations and reduces in case of grating structures to the Helmholtz equation. For the numerical simulation, e.g. finite element methods can be applied to solve the corresponding boundary value problems. More challenging is the inverse problem, where the grating geometry is to be reconstructed from the measured diffraction patterns. Restricting the class of gratings and the set of measurements ...
- ItemShape derivatives for the scattering by biperiodic gratings(Berlin : Weierstraß-Institut für Angewandte Analysis und Stochastik, 2011) Rathsfeld, AndreasUsually, the light diffraction by biperiodic grating structures is simulated by the time-harmonic Maxwell system with a constant magnetic permeability. For the optimization of the geometry parameters of the grating, a functional is defined which depends quadratically on the efficiencies of the reflected modes. The minimization of this functional by gradient based optimization schemes requires the computation of the shape derivatives of the functional with respect to the parameters of the geometry. Using classical ideas of shape calculus, formulas for these parameter derivatives are derived. In particular, these derivatives can be computed as material derivatives corresponding to a family of transformations of the underlying domain. However, the energy space $H(rm curl)$ for the electric fields is not invariant with respect to the transformation of geometry. Therefore, the formulas are derived first for the magnetic field vectors which belong to $[H^1]^3$. Afterwards, the magnetic fields in the shape-derivative formula are replaced by their electric counter parts. Numerical tests confirm the derived formulas.