Composition profiling of inhomogeneous SiGe nanostructures by Raman spectroscopy

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dc.bibliographicCitation.firstPage633eng
dc.bibliographicCitation.journalTitleNanoscale Research Letterseng
dc.bibliographicCitation.lastPage412eng
dc.bibliographicCitation.volume7eng
dc.contributor.authorPicco, A.
dc.contributor.authorBonera, E.
dc.contributor.authorPezzoli, F.
dc.contributor.authorGrilli, E.
dc.contributor.authorSchmidt, O.G.
dc.contributor.authorIsa, F.
dc.contributor.authorCecchi, S.
dc.contributor.authorGuzzi, M.
dc.date.accessioned2020-09-29T09:09:41Z
dc.date.available2020-09-29T09:09:41Z
dc.date.issued2012
dc.description.abstractIn this work, we present an experimental procedure to measure the composition distribution within inhomogeneous SiGe nanostructures. The method is based on the Raman spectra of the nanostructures, quantitatively analyzed through the knowledge of the scattering efficiency of SiGe as a function of composition and excitation wavelength. The accuracy of the method and its limitations are evidenced through the analysis of a multilayer and of self-assembled islands.eng
dc.description.versionpublishedVersioneng
dc.identifier.urihttps://doi.org/10.34657/4403
dc.identifier.urihttps://oa.tib.eu/renate/handle/123456789/5774
dc.language.isoengeng
dc.publisherNew York, NY [u.a.] : Springereng
dc.relation.doihttps://doi.org/10.1186/1556-276X-7-633
dc.relation.issn1931-7573
dc.rights.licenseCC BY 2.0 Unportedeng
dc.rights.urihttps://creativecommons.org/licenses/by/2.0/eng
dc.subject.ddc530eng
dc.subject.otherCompositioneng
dc.subject.otherNanotechnologyeng
dc.subject.otherRamaneng
dc.subject.otherRaman efficiencyeng
dc.subject.otherSiGeeng
dc.subject.otherStructural characterizationeng
dc.subject.otherChemical analysiseng
dc.subject.otherEfficiencyeng
dc.subject.otherNanostructureseng
dc.subject.otherNanotechnologyeng
dc.subject.otherComposition distributionseng
dc.subject.otherExperimental procedureeng
dc.subject.otherRamaneng
dc.subject.otherRaman efficiencyeng
dc.subject.otherScattering efficiencyeng
dc.subject.otherSelf-assembled islandseng
dc.subject.otherSiGeeng
dc.subject.otherStructural characterizationeng
dc.subject.otherSi-Ge alloyseng
dc.titleComposition profiling of inhomogeneous SiGe nanostructures by Raman spectroscopyeng
dc.typeArticleeng
dc.typeTexteng
tib.accessRightsopenAccesseng
wgl.contributorIFWDeng
wgl.subjectPhysikeng
wgl.typeZeitschriftenartikeleng

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