Radio Frequency CMOS Chem-bio Viscosity Sensors based on Dielectric Spectroscopy

Abstract

This paper presents a CMOS Radio frequency dielectric sensor platform for the detection of relative viscosity changes in a fluid sample. The operating frequency of the sensor is 12.28 GHz. This frequency range has been chosen for high signal to noise ratio and also to avoid other low frequency dispersion mechanisms for future lab on chip applications. The sensor chip has been fabricated in 250 nm BiCMOS technology of IHP. The measurements conducted to show the relative viscosity variation detection capability of the sensor chip, were based on mixtures of glycerol and water as well as glycerol and organic alcohol. The detection limit of viscosity is dependent on the permittivity contrast of the sample constituent. Therefore, it is also shown the choice of frequency inherently aids in the permittivity contrast of the sample constituents.