Integration of processes and moDules for the 2 nm node meeting Power Performance Area and Cost requirements (ID2PPAC)
ID2PPAC Schlussbericht Fraunhofer : Teilvorhaben: T4.1: Anamorphic mask, T4.3: Multilayer modification system and algorithm development
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Hannover : Technische Informationsbibliothek
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Creative Commons Attribution-NonDerivs 3.0 Germany