Integration of processes and moDules for the 2 nm node meeting Power Performance Area and Cost requirements (ID2PPAC)
| dc.contributor.author | ||
| dc.date.accessioned | 2025-10-24T06:50:29Z | |
| dc.date.available | 2025-10-24T06:50:29Z | |
| dc.date.issued | 2024 | |
| dc.description.abstract | Datei-Upload durch TIB | ger |
| dc.description.version | publishedVersion | |
| dc.identifier.uri | https://oa.tib.eu/renate/handle/123456789/25064 | |
| dc.identifier.uri | https://doi.org/10.34657/24081 | |
| dc.language.iso | ger | |
| dc.publisher | Hannover : Technische Informationsbibliothek | |
| dc.relation.affiliation | Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) | |
| dc.rights.license | Creative Commons Attribution-NonDerivs 3.0 Germany | |
| dc.rights.uri | https://creativecommons.org/licenses/by-nd/3.0/de/ | |
| dc.subject.ddc | 600 | |
| dc.title | Integration of processes and moDules for the 2 nm node meeting Power Performance Area and Cost requirements (ID2PPAC) | ger |
| dc.title.subtitle | ID2PPAC Schlussbericht Fraunhofer : Teilvorhaben: T4.1: Anamorphic mask, T4.3: Multilayer modification system and algorithm development | |
| dc.type | Report | |
| dc.type | Text | |
| dcterms.event.date | 01/06/2021-31/5/2024 | |
| dcterms.extent | 29 Seiten | |
| dtf.funding.funder | BMFTR | |
| dtf.funding.program | 16MEE0187 | |
| dtf.funding.verbundnummer | 01234396 | |
| tib.accessRights | openAccess |
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