Fabrication of Aspherical Microlenses in Fused Silica and Silicon

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dc.bibliographicCitation.firstPage81
dc.bibliographicCitation.journalTitleGlass Science and Technology
dc.bibliographicCitation.lastPage84
dc.bibliographicCitation.volume76 C2
dc.contributor.authorVölkel, Reinhard
dc.contributor.authorEisner, Martin
dc.contributor.authorWeible, Kenneth J.
dc.date.accessioned2024-08-23T14:47:11Z
dc.date.available2024-08-23T14:47:11Z
dc.date.issued2003
dc.description.abstractWe report on the manufacturing, testing and packaging of microlens arrays and micro-optical Systems. We will present applications in photolithography, miniaturized imaging systems, optical networking and sensors.eng
dc.description.versionpublishedVersion
dc.identifier.urihttps://oa.tib.eu/renate/handle/123456789/14873
dc.identifier.urihttps://doi.org/10.34657/13895
dc.language.isoeng
dc.publisherOffenbach : Verlag der Deutschen Glastechnischen Gesellschaft
dc.relation.issn0946-7475
dc.rights.licenseCC BY 3.0 DE
dc.rights.urihttps://creativecommons.org/licenses/by/3.0/de/
dc.subject.ddc660
dc.subject.gndKonferenzschrift
dc.titleFabrication of Aspherical Microlenses in Fused Silica and Siliconeng
dc.typeArticle
dc.typeText
tib.accessRightsopenAccess
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