Fabrication of Aspherical Microlenses in Fused Silica and Silicon

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Date

Editor

Advisor

Volume

76 C2

Issue

Journal

Glass Science and Technology

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Book Title

Publisher

Offenbach : Verlag der Deutschen Glastechnischen Gesellschaft

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Abstract

We report on the manufacturing, testing and packaging of microlens arrays and micro-optical Systems. We will present applications in photolithography, miniaturized imaging systems, optical networking and sensors.

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Keywords

Keywords GND

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Publication Type

Article

Version

publishedVersion

License

CC BY 3.0 DE