Fabrication of Aspherical Microlenses in Fused Silica and Silicon
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Date
Editor
Advisor
Volume
76 C2
Issue
Journal
Glass Science and Technology
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Book Title
Publisher
Offenbach : Verlag der Deutschen Glastechnischen Gesellschaft
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Abstract
We report on the manufacturing, testing and packaging of microlens arrays and micro-optical Systems. We will present applications in photolithography, miniaturized imaging systems, optical networking and sensors.
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Keywords GND
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Publication Type
Article
Version
publishedVersion
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License
CC BY 3.0 DE
