Fabrication of Aspherical Microlenses in Fused Silica and Silicon

Loading...
Thumbnail Image
Date
2003
Volume
76 C2
Issue
Journal
Glass Science and Technology
Series Titel
Book Title
Publisher
Offenbach : Verlag der Deutschen Glastechnischen Gesellschaft
Link to publishers version
Abstract

We report on the manufacturing, testing and packaging of microlens arrays and micro-optical Systems. We will present applications in photolithography, miniaturized imaging systems, optical networking and sensors.

Description
Keywords
License
CC BY 3.0 DE