Feature Adaptive Sampling for Scanning Electron Microscopy
dc.bibliographicCitation.firstPage | 25350 | eng |
dc.bibliographicCitation.volume | 6 | eng |
dc.contributor.author | Dahmen, Tim | |
dc.contributor.author | Engstler, Michael | |
dc.contributor.author | Pauly, Christoph | |
dc.contributor.author | Trampert, Patrick | |
dc.contributor.author | de Jonge, Niels | |
dc.contributor.author | Mücklich, Frank | |
dc.contributor.author | Slusallek, Philipp | |
dc.date.accessioned | 2022-05-23T07:22:38Z | |
dc.date.available | 2022-05-23T07:22:38Z | |
dc.date.issued | 2016 | |
dc.description.abstract | A new method for the image acquisition in scanning electron microscopy (SEM) was introduced. The method used adaptively increased pixel-dwell times to improve the signal-to-noise ratio (SNR) in areas of high detail. In areas of low detail, the electron dose was reduced on a per pixel basis and a-posteriori image processing techniques were applied to remove the resulting noise. The technique was realized by scanning the sample twice. The first, quick scan used small pixel-dwell times to generate a first, noisy image using a low electron dose. This image was analyzed automatically and a software algorithm generated a sparse pattern of regions of the image that require additional sampling. A second scan generated a sparse image of only these regions, but using a highly increased electron dose. By applying a selective low-pass filter and combining both datasets, a single image was generated. The resulting image exhibited a factor of ≈3 better SNR than an image acquired with uniform sampling on a Cartesian grid and the same total acquisition time. This result implies that the required electron dose (or acquisition time) for the adaptive scanning method is a factor of ten lower than for uniform scanning. | eng |
dc.description.version | publishedVersion | eng |
dc.identifier.uri | https://oa.tib.eu/renate/handle/123456789/9028 | |
dc.identifier.uri | https://doi.org/10.34657/8066 | |
dc.language.iso | eng | eng |
dc.publisher | [London] : Macmillan Publishers Limited, part of Springer Nature | eng |
dc.relation.doi | https://doi.org/10.1038/srep25350 | |
dc.relation.essn | 2045-2322 | |
dc.relation.ispartofseries | Scientific reports 6 (2016) | eng |
dc.rights.license | CC BY 4.0 Unported | eng |
dc.rights.uri | https://creativecommons.org/licenses/by/4.0/ | eng |
dc.subject | tomography | eng |
dc.subject | beam | eng |
dc.subject | damage | eng |
dc.subject | tilt | eng |
dc.subject | cells | eng |
dc.subject.ddc | 500 | eng |
dc.subject.ddc | 600 | eng |
dc.title | Feature Adaptive Sampling for Scanning Electron Microscopy | eng |
dc.type | article | eng |
dc.type | Text | eng |
dcterms.bibliographicCitation.journalTitle | Scientific reports | eng |
tib.accessRights | openAccess | eng |
wgl.contributor | INM | eng |
wgl.subject | Ingenieurwissenschaften | eng |
wgl.type | Zeitschriftenartikel | eng |
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