Laser Embossing of Micro-and Submicrometer Surface Structures in Copper

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Date
2012
Volume
39
Issue
Journal Title
Title
Series Titel
Publisher
Amsterdam [u.a.] : Elsevier
Abstract

Micro- and submicrometer structures have been transferred from nickel foils into solid copper surfaces by laser microembossing. The developed arrangement for laser microembossing allows a large-area replication using multi- pulse laser scanning scheme, guaranties a low contamination of the embossed surface and enables the utilization of thick workpieces. In the micrometer range the replicated patterns feature a high accuracy regarding the shape. A significant difference between the master and the replication pattern could be observed for the laser embossing of submicrometer patterns. In conclusion, the results show that the proposed laser embossing process is a promising method with a number of applications in microengineering.

Description
Keywords
Copper, Embossing, Laser, Metal, Micro, Replication, Submicro patterns
Citation
Ehrhardt, M., Lorenz, P., Frost, F., & Zimmer, K. (2012). Laser Embossing of Micro-and Submicrometer Surface Structures in Copper. 39. https://doi.org//10.1016/j.phpro.2012.10.095
License
CC BY-NC-ND 3.0 Unported