Dense arrays of uniform submicron pores in silicon and their applications

We report a versatile particle-based route to dense arrays of parallel submicron pores with high aspect ratio in silicon, and explore the application of these arrays in sensors, optics, and polymer micropatterning. Polystyrene (PS) spheres are convectively assembled on gold-coated silicon wafers and sputter-etched, resulting in well-defined gold disc arrays with excellent long-range order. The gold discs act as catalysts in Metal-Assisted Chemical Etching (MACE), yielding uniform pores with straight walls, flat bottoms and high aspect ratio. The resulting pore arrays can be used as robust antireflective surfaces, in biosensing applications, and as templates for polymer replica molding.

URI

https://doi.org/10.34657/1448
https://oa.tib.eu/renate/handle/123456789/4162

Citation

Brodoceanu, D., Elnathan, R., Prieto-Simón, B., Delalat, B., Guinan, T. M., Kroner, E. K., et al. (2015). Dense arrays of uniform submicron pores in silicon and their applications (Washington D.C. : American Chemical Society). Washington D.C. : American Chemical Society. https://doi.org//10.1021/am506891d

Collections

Physik

License

This document may be downloaded, read, stored and printed for your own use within the limits of § 53 UrhG but it may not be distributed via the internet or passed on to external parties.
Dieses Dokument darf im Rahmen von § 53 UrhG zum eigenen Gebrauch kostenfrei heruntergeladen, gelesen, gespeichert und ausgedruckt, aber nicht im Internet bereitgestellt oder an Außenstehende weitergegeben werden.

Full item page