Composition profiling of inhomogeneous SiGe nanostructures by Raman spectroscopy
Loading...
Date
Editor
Advisor
Volume
7
Issue
Journal
Nanoscale Research Letters
Series Titel
Book Title
Publisher
New York, NY [u.a.] : Springer
Supplementary Material
Other Versions
Link to publishers' Version
Abstract
In this work, we present an experimental procedure to measure the composition distribution within inhomogeneous SiGe nanostructures. The method is based on the Raman spectra of the nanostructures, quantitatively analyzed through the knowledge of the scattering efficiency of SiGe as a function of composition and excitation wavelength. The accuracy of the method and its limitations are evidenced through the analysis of a multilayer and of self-assembled islands.
Description
Keywords
Composition, Nanotechnology, Raman, Raman efficiency, SiGe, Structural characterization, Chemical analysis, Efficiency, Nanostructures, Nanotechnology, Composition distributions, Experimental procedure, Raman, Raman efficiency, Scattering efficiency, Self-assembled islands, SiGe, Structural characterization, Si-Ge alloys
Keywords GND
Conference
Publication Type
Article
Version
publishedVersion
Collections
License
CC BY 2.0 Unported