Employing spectroscopic ellipsometry for glass coating applications

Abstract

Precise measurements of the thin films used in glass industry are important for quality glass coating requirements. Both film thickness and optical properties are critical to the heat protection or anti-reflection coating behavior. Spectroscopic ellipsometry is becoming used extensively to characterize dielectrics, organics, metals and semiconductors. This article describes why spectroscopic ellipsometry is important for glass coatings and discusses a few applications, including multilayer anti-reflection coatings.