Employing spectroscopic ellipsometry for glass coating applications

dc.bibliographicCitation.firstPage	152
dc.bibliographicCitation.journalTitle	Glass Science and Technology	eng
dc.bibliographicCitation.lastPage	155
dc.bibliographicCitation.volume	74
dc.contributor.author	Wagner, Thomas
dc.contributor.author	Anderson, Charles
dc.date.accessioned	2024-01-05T15:17:04Z
dc.date.available	2024-01-05T15:17:04Z
dc.date.issued	2001
dc.description.abstract	Precise measurements of the thin films used in glass industry are important for quality glass coating requirements. Both film thickness and optical properties are critical to the heat protection or anti-reflection coating behavior. Spectroscopic ellipsometry is becoming used extensively to characterize dielectrics, organics, metals and semiconductors. This article describes why spectroscopic ellipsometry is important for glass coatings and discusses a few applications, including multilayer anti-reflection coatings.	eng
dc.description.version	publishedVersion
dc.identifier.uri	https://oa.tib.eu/renate/handle/123456789/14022
dc.identifier.uri	https://doi.org/10.34657/13052
dc.language.iso	eng
dc.publisher	Offenbach : Verlag der Deutschen Glastechnischen Gesellschaft
dc.relation.issn	0946-7475
dc.rights.license	CC BY 3.0 DE
dc.rights.uri	https://creativecommons.org/licenses/by/3.0/de/
dc.subject.ddc	660
dc.title	Employing spectroscopic ellipsometry for glass coating applications	eng
dc.type	Article	eng
dc.type	Text	eng
tib.accessRights	openAccess

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